3

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

Year:
2020
Language:
english
File:
PDF, 4.61 MB
english, 2020
7

Frequency-dependent noise analysis and damping in MEMS

Year:
2009
Language:
english
File:
PDF, 676 KB
english, 2009
15

A novel dynamic pull-in MEMS gyroscope

Year:
2011
Language:
english
File:
PDF, 710 KB
english, 2011
19

Novel Tactile Sensor Technology and Smart Tactile Sensing Systems: A Review

Year:
2017
Language:
english
File:
PDF, 1.65 MB
english, 2017
21

Characterization of a pull-in based -resolution accelerometer

Year:
2010
Language:
english
File:
PDF, 601 KB
english, 2010
22

Simulation and Characterization of a Novel Large Stroke Micromirror

Year:
2011
Language:
english
File:
PDF, 2.77 MB
english, 2011
25

Novel sliding mode control for MEMS-based resonators

Year:
2011
Language:
english
File:
PDF, 717 KB
english, 2011
28

Design and fabrication of SU-8 CMUT arrays through grayscale lithography

Year:
2018
Language:
english
File:
PDF, 2.78 MB
english, 2018
43

SMOOTHING DIMENSIONS FOR TIME SERIES CHARACTERIZATION

Year:
1995
Language:
english
File:
PDF, 524 KB
english, 1995